Scanning probe microscope BRUKER DIMENSION ICON coupled with a RENISHAW INVIA Raman spectrometer
The SPM/Raman hybrid system enables nanoscale resolution morphological, electrical (conductivity, capacitance, impedance, surface, potential), magnetic and thermal analyses of materials and devices, co-localized with Raman and PL spectroscopy/mapping.
It is a very versatile characterization equipment, conceived to address several crucial needs of the Beyond Nano infrastructure, such as:
– investigation of the electronic transport, vibrational, optical and thermal properties of new/advanced materials;
-study of materials modifications during the different processing steps of devices’ prototypes fabrication;
– 2D imaging of the carrier distribution of the final devices’ structure (e.g. by SCM, SSRM and SMIM);
– mapping of temperature distribution in operating power devices (by SThM combined with Raman thermometry).
