S neox 090 3D Optical Profiler

The S neox 090 3D optical profilometers is used to measure roughness, step height, texture, geometry, thickness, and more for any material.

Confocal

Confocal profiler has been developed for  measuring the surface height of smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution, up to 0.15 μm line and space. High NA (0.95) and high magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°).

Interferometry

Interferometry has been developed to measure the surface height of very smooth to moderately rough surfaces, achieving same system noise at any magnification. For PSI, it can achieve system noise better than 0.01 nm.

Sensofar Focus Variation

The Focus Variation optical technology has been developed for measuring the  the shape of large rough surfaces. Highlights of the technology include high slope surfaces (up to 86°), highest speed (up to 3mm/s) and large vertical range measurements

Thin film measurement

The Film measurement technology has been developed for measuring the   thickness of optically transparent layers. Sample evaluation spot diameter is dependent on the objective magnification which can be as low as 0.5 μm and up to 40 μm.

 

Configuration

  • Confocal profilers
  • Phase Shift Interferometry
  • Active illumination Focus Variation
  • Thin film measurement